Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154814 | Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array | — | 2024-11-26 |
| 12077862 | Connector for substrate support with embedded temperature sensors | Donald J. Miller | 2024-09-03 |
| 11869794 | Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array | — | 2024-01-09 |