Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990360 | Electrostatic chuck (ESC) pedestal voltage isolation | Vincent E. Burkhart | 2024-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11990360 | Electrostatic chuck (ESC) pedestal voltage isolation | Vincent E. Burkhart | 2024-05-21 |