Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074049 | Permanent secondary erosion containment for electrostatic chuck bonds | — | 2024-08-27 |
| 12060636 | Method for conditioning a plasma processing chamber | Chiara Helena Catherina Giammanco MacPherson | 2024-08-13 |
| 12020960 | Determining and controlling substrate temperature during substrate processing | Jeremy George SMITH | 2024-06-25 |