AS

Akhil Singhal

Lam Research: 2 patents #62 of 408Top 20%
Overall (2024): #188,636 of 561,600Top 35%
2
Patents 2024

Issued Patents 2024

Patent #TitleCo-InventorsDate
11915923 Method to clean SnO2 film from chamber Dustin Zachary Austin, Jeongseok Ha, Pei-Chi Liu 2024-02-27
11887846 Deposition tool and method for depositing metal oxide films on organic materials Patrick A. Van Cleemput 2024-01-30