Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12070848 | Robot detection and control system within chamber and substrate processing apparatus including the same | Da Sol Kim, Hyeonin Kang | 2024-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12070848 | Robot detection and control system within chamber and substrate processing apparatus including the same | Da Sol Kim, Hyeonin Kang | 2024-08-27 |