Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927881 | Pellicle for extreme ultraviolet lithography based on yttrium carbide | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2024-03-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11927881 | Pellicle for extreme ultraviolet lithography based on yttrium carbide | Hyeong Keun Kim, Seul Gi Kim, Hyun Mi Kim, Jin-woo Cho | 2024-03-12 |