Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920257 | Method of evaluating cleanliness, method of determining cleaning condition, and method of manufacturing silicon wafer | Hirokazu Kato | 2024-03-05 |
| 11860037 | Interferometer movable mirror position measurement apparatus and fourier transform infrared spectroscopy | — | 2024-01-02 |