Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163226 | Substrate processing apparatus, reaction container, method of manufacturing semiconductor device, and recording medium | — | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163226 | Substrate processing apparatus, reaction container, method of manufacturing semiconductor device, and recording medium | — | 2024-12-10 |