Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996337 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Kayoko Yashiki | 2024-05-28 |
| 11966210 | Substrate processing apparatus, device management controller, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2024-04-23 |