Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11888036 | Method for setting a nitrogen concentration of a silicon epitaxial film in manufacturing an epitaxial silicon wafer | Toshiaki Ono, Kazuhisa Torigoe | 2024-01-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11888036 | Method for setting a nitrogen concentration of a silicon epitaxial film in manufacturing an epitaxial silicon wafer | Toshiaki Ono, Kazuhisa Torigoe | 2024-01-30 |