Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934096 | Frame member for electron beam lithography device and electron beam lithography device | Shigenobu Furukawa | 2024-03-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11934096 | Frame member for electron beam lithography device and electron beam lithography device | Shigenobu Furukawa | 2024-03-19 |