Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098282 | Film-forming composition, silicon-containing film, and resist pattern-forming method | Tomoaki Seko, Nozomi SATOU, Hiromitsu Tanaka, Tatsuya Sakai | 2024-09-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098282 | Film-forming composition, silicon-containing film, and resist pattern-forming method | Tomoaki Seko, Nozomi SATOU, Hiromitsu Tanaka, Tatsuya Sakai | 2024-09-24 |