Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014903 | Plasma processing apparatus | Tetsuo Kawanabe, Motohiro Tanaka, Kohei Sato | 2024-06-18 |
| 12002692 | Operation method of vacuum processing device | Ryoichi Isomura, Keitarou Ogawa | 2024-06-04 |