Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11898254 | Processing method for fluorination of fluorination-target component for semiconductor fabrication equipment, which minimizes generation of contaminant particles, and fluorinated component obtained thereby | Yoonjae YU, Seungyoung Oh, Eunyoung Choi, Joohee Jang, Sanghyun Cho | 2024-02-13 |