Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142489 | Semiconductor device manufacturing method and plasma processing method | Mamoru Yakushiji, Makoto Miura | 2024-11-12 |
| 11887814 | Plasma processing method | Mamoru Yakushiji, Masaaki Taniyama | 2024-01-30 |