Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176202 | Manufacture method of a high-resistivity silicon handle wafer for a hybrid substrate structure | Päivi Sievilä, Samuli Sievänen, Jukka Lähteenmäki, Joel Salmi, Atte Haapalinna | 2024-12-24 |