Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062565 | Electrostatic chuck, assembly including the electrostatic chuck, and method of controlling temperature of the electrostatic chuck | Hong Gao, Shanker Kuttath, Changmin Lee | 2024-08-13 |
| 11996312 | Electrostatic chuck | Hong Gao, Shanker Kuttath | 2024-05-28 |