Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125708 | Etching method | Takashi Hattori, Yu Zhao, Hiroyuki Kobayashi | 2024-10-22 |
| 11901192 | Etching processing method and etching processing apparatus | Takashi Hattori | 2024-02-13 |