Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000039 | Cleaning anti-reflective coating process chamber parts | Michael Walach | 2024-06-04 |
| 12000040 | Cleaning anti-reflective coating process chamber parts | Michael Walach | 2024-06-04 |