Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901162 | Vacuum processing apparatus and method of cleaning vacuum processing apparatus | Takehisa MIYAYA, Yoshiaki Yamamoto, Kenji ETO, Yoichi Abe | 2024-02-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901162 | Vacuum processing apparatus and method of cleaning vacuum processing apparatus | Takehisa MIYAYA, Yoshiaki Yamamoto, Kenji ETO, Yoichi Abe | 2024-02-13 |