Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901156 | Multi-charged-particle-beam writing apparatus and multi-charged-particle-beam writing method | Ryosuke Ueba, Satoru Hirose, Shunsuke ISAJI | 2024-02-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901156 | Multi-charged-particle-beam writing apparatus and multi-charged-particle-beam writing method | Ryosuke Ueba, Satoru Hirose, Shunsuke ISAJI | 2024-02-13 |