Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020976 | Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus | Haiyang Xu, Koji Maeda | 2024-06-25 |
| 12002688 | Substrate cleaning device and substrate cleaning method | Haiyang Xu | 2024-06-04 |
| 11996303 | Substrate cleaning device and substrate cleaning method | Haiyang Xu | 2024-05-28 |
| 11869788 | Substrate processing device | Koji Maeda, Haiyang Xu, Tetsuya Yashima | 2024-01-09 |