Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176241 | Support structure for thermal processing systems | Rolf Bremensdorfer, Silke Hamm, Alex Wansidler | 2024-12-24 |
| 12068177 | Rapid thermal processing system with cooling system | Rolf Bremensdorfer, Silke Hamm, Dieter Hezler | 2024-08-20 |
| 11955315 | Workpiece processing apparatus with plasma and thermal processing systems | Dieter Hezler, Keli Huang, Jianmin JI, Deqiang Zeng | 2024-04-09 |