Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106946 | Turbomolecular pump and cathode assembly for etching reactor | Thorsten Lill | 2024-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106946 | Turbomolecular pump and cathode assembly for etching reactor | Thorsten Lill | 2024-10-01 |