Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875967 | System apparatus and method for enhancing electrical clamping of substrates using photo-illumination | Qin Chen, Julian G. Blake, Michael W. Osborne, Steven M. Anella | 2024-01-16 |