Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948784 | Tilted PVD source with rotating pedestal | Hong Yang, Suresh Palanisamy | 2024-04-02 |
| 11881427 | Substrate flipping in vacuum for dual sided PVD sputtering | Suresh Palanisamy, Dinesh Babu Rajamanickam, Naresh Kumar Asokan | 2024-01-23 |