Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981560 | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture | Xin Zhang, Christopher Needham, Andrew Proudman, Nikolay Pokrovskiy, Laura Cornelia Popa +1 more | 2024-05-14 |