Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136538 | Deposition chamber system diffuser with increased power efficiency | Lai ZHAO, Gaku Furuta, Soo Young Choi, Robin L. Tiner, David Atchley +1 more | 2024-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136538 | Deposition chamber system diffuser with increased power efficiency | Lai ZHAO, Gaku Furuta, Soo Young Choi, Robin L. Tiner, David Atchley +1 more | 2024-11-05 |