Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12096622 | Directional etch for improved dual deck three-dimensional NAND architecture margin | John Hautala, Johannes M. van Meer | 2024-09-17 |
| 11987879 | High aspect ratio taper improvement using directional deposition | Yan Zhang, John Hautala | 2024-05-21 |
| 11942361 | Semiconductor device cavity formation using directional deposition | Tristan Y. Ma, Johannes M. van Meer, John Hautala, Naushad K. Variam | 2024-03-26 |