Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984320 | Method for polishing silicon wafer with reduced wear on carrier, and polishing liquid used therein | Hayato Yamaguchi, Yusuke Tanatsugu | 2024-05-14 |
| 11884844 | Composition for post-polishing to be used after primary polishing of silicon wafers | Hibiki Ishijima | 2024-01-30 |
| 11873420 | Cation-containing polishing composition for eliminating protrusions around laser mark | Hayato Yamaguchi, Hibiki Ishijima | 2024-01-16 |