Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11960202 | EUV mask defect tool apparatus | Chami N. Perera, Charles Graeme Murray, Alexander N. Khodarev, Travis W. Grodt | 2024-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11960202 | EUV mask defect tool apparatus | Chami N. Perera, Charles Graeme Murray, Alexander N. Khodarev, Travis W. Grodt | 2024-04-16 |