Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866453 | Scandium precursor for SC2O3 or SC2S3 atomic layer deposition | — | 2024-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866453 | Scandium precursor for SC2O3 or SC2S3 atomic layer deposition | — | 2024-01-09 |