Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128522 | Polishing head, chemical-mechanical polishing system and method for polishing substrate | Shu-Bin Hsu, Ren-Guei Lin, Feng-Inn Wu, Sheng-Chen Wang | 2024-10-29 |
| 12070833 | Method of using polishing pad | Chunhung Chen, Sheng-Chen Wang, Shih-Sian HUANG | 2024-08-27 |