Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939212 | MEMS device, manufacturing method of the same, and integrated MEMS module using the same | Heng-Chung Chang, Jhih-Jie Huang, Chih-Ya Tsai | 2024-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11939212 | MEMS device, manufacturing method of the same, and integrated MEMS module using the same | Heng-Chung Chang, Jhih-Jie Huang, Chih-Ya Tsai | 2024-03-26 |