Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087601 | Reducing line edge roughness and mitigating defects by wafer freezing | Jennifer Fullam, Yongan Xu | 2024-09-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087601 | Reducing line edge roughness and mitigating defects by wafer freezing | Jennifer Fullam, Yongan Xu | 2024-09-10 |