Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105411 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Kota Suzuki | 2024-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105411 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device | Kota Suzuki | 2024-10-01 |