Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153338 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Osamu Nozawa | 2024-11-26 |
| 12013631 | Mask blank, transfer mask, and method for manufacturing semiconductor device | — | 2024-06-18 |
| 12007684 | Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2024-06-11 |