Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12063721 | Heater | Shigenobu SAKITA, Akira Mikumo | 2024-08-13 |
| 12046488 | Semiconductor manufacturing apparatus and wafer holding table for semiconductor manufacturing apparatus | Akira Mikumo | 2024-07-23 |
| 12033880 | Wafer holding body | Shigenobu SAKITA, Kenji Shinma, Daisuke Shimao, Katsuhiro Itakura, Masuhiro Natsuhara +1 more | 2024-07-09 |