Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105419 | Salt, quencher, resist composition and method for producing resist pattern | Yuki Takahashi, Koji Ichikawa | 2024-10-01 |
| 12060316 | Carboxylate, quencher, resist composition and method for producing resist pattern | Koji Ichikawa | 2024-08-13 |
| 11899363 | Salt, acid generator, resist composition and method for producing resist pattern | Koji Ichikawa | 2024-02-13 |