Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12175569 | Terminal device and RF power supply device | Naoto Takahashi, Naoya Fujimoto | 2024-12-24 |
| 11901159 | RF generator device and substrate processing apparatus | Naoto Takahashi, Naoya Fujimoto, Sunao Egashira | 2024-02-13 |