Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12103134 | Wafer loading bracket, wafer loading system, and wafer mounting method for CMP process | Hui Xu | 2024-10-01 |
| 11961749 | Wafer detection device and wafer detection method using the same | Ming Zhu, Yangyang Chen | 2024-04-16 |
| 11908720 | CMP wafer cleaning equipment, wafer transfer robot and wafer flipping method | EdwardLiCang LEE | 2024-02-20 |