Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915922 | Silicon wafer for an electronic component and method for the production thereof | Kai Schillinger, Frank Siebke | 2024-02-27 |
| 11862462 | Method and apparatus for the continuous vapor deposition of silicon on substrates | Kai Schillinger | 2024-01-02 |