Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11860059 | Smart seals for monitoring and analysis of seal properties useful in semiconductor valves | Mookkan Periyasamy, Elizabeth Sassano, Otto J. Gregory, Godi Fischer, Tao Wei +2 more | 2024-01-02 |