Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068572 | Narrowed-line gas laser apparatus and method for manufacturing electronic devices | — | 2024-08-20 |
| 11947263 | Laser chamber and electronic device manufacturing method | Makoto Tanaka, Takashi Ito, Yousuke Kawagoe | 2024-04-02 |