Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180069 | Method and system for fabricating a MEMS device | Daesung Lee | 2024-12-31 |
| 12139397 | Selective self-assembled monolayer patterning with sacrificial layer for devices | Daesung Lee | 2024-11-12 |
| 11952267 | Modification to rough polysilicon using ion implantation and silicide | Daesung Lee | 2024-04-09 |
| 11919769 | Sensor with dimple features and improved out-of-plane stiction | Ashfaque Uddin, Daesung Lee | 2024-03-05 |
| 11905170 | MEMS tab removal process | Daesung Lee | 2024-02-20 |