Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12155168 | Line narrowing gas laser device and electronic device manufacturing method | Yusuke Saito, Masanori YASHIRO, Hiroshi Furusato, Tokinori Terao | 2024-11-26 |
| 12049694 | Method for depositing boron nitride film and film deposition apparatus | Shota CHIDA | 2024-07-30 |
| 11875923 | Noise reduction element | Ayumi SAKAI, Yuichi Sasaki | 2024-01-16 |