Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009183 | Film-forming method, manufacturing method of electronic device, and plasma atomic layer deposition apparatus | Keisuke Washio, Tatsuya Matsumoto, Junichi Shida | 2024-06-11 |