Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158576 | Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems | Rudy F. Garcia, Ravichandra Jagannath | 2024-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158576 | Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems | Rudy F. Garcia, Ravichandra Jagannath | 2024-12-03 |