Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112958 | Wafer processing system | Chien-Cheng Chang, Chia-Ou Chang | 2024-10-08 |
| 12002677 | Processing device and processing method for solid structure | Wen-Yung Yeh | 2024-06-04 |
| 11895765 | Hybrid plasma source and operation method thereof | — | 2024-02-06 |
| 11889609 | Annealing system and annealing method integrated with laser and microwave | Wen-Yung Yeh | 2024-01-30 |