Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978622 | Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility | Lingyan Song, Emanuel I. Cooper | 2024-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978622 | Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility | Lingyan Song, Emanuel I. Cooper | 2024-05-07 |